Inventor
VISHWANATH YOGANANDA SARODE
IN7 patents
Patents
7 patentsUS9287095B2Mar 15, 2016
Semiconductor system assemblies and methods of operation
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US9449794B2Sep 20, 2016
Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna
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US11835146B2Dec 5, 2023
Symmetric flow valve for flow conductance control
APPLIED MATERIALS INC0 citations55
US11199267B2Dec 14, 2021
Symmetric flow valve for higher flow conductance
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US12100576B2Sep 24, 2024
Metal oxide preclean chamber with improved selectivity and flow conductance
APPLIED MATERIALS INC0 citations49
US11913777B2Feb 27, 2024
Detector for process kit ring wear
APPLIED MATERIALS INC0 citations48
US10672591B2Jun 2, 2020
Apparatus for removing particles from a twin chamber processing system
APPLIED MATERIALS INC0 citations41