Inventor
GALSTYAN OGSEN
KR7 patents
Patents
7 patentsUS11823874B2Nov 21, 2023
Substrate treating apparatus and method for controlling temperature of ferrite core
SEMES CO LTD2 citations70
US12456606B2Oct 28, 2025
Support unit and apparatus for treating substrate
SEMES CO LTD0 citations58
US10600618B2Mar 24, 2020
Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus
SEMES CO LTD1 citations58
US11195705B2Dec 7, 2021
Plasma generating unit and substrate treating apparatus comprising the same
SEMES CO LTD0 citations50
US12249491B2Mar 11, 2025
Substrate treating apparatus and substrate support unit
SEMES CO LTD0 citations47
US12125678B2Oct 22, 2024
Filter unit, substrate treating apparatus including the same, and substrate treating method
SEMES CO LTD0 citations42
US10319566B2Jun 11, 2019
Apparatus for supplying power and apparatus for treating substrate including the same
SEMES CO LTD0 citations37