Inventor
STOFT PAUL E
8 patents
⚠️ This page may combine multiple inventors who share the name “STOFT PAUL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KASPER INSTRUMENTS
4 patentsUS4070117AJan 24, 1978
Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask
KASPER INSTRUMENTS46 citations91
US3955072AMay 4, 1976
Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask
KASPER INSTRUMENTS45 citations91
US4408885AOct 11, 1983
Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask
KASPER INSTRUMENTS12 citations72
US4259019AMar 31, 1981
Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask
KASPER INSTRUMENTS10 citations72