Inventor
KUSHIBIKI MASATO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “KUSHIBIKI MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS8383521B2Feb 26, 2013
Substrate processing method
TOKYO ELECTRON LTD8 citations83
US7811939B2Oct 12, 2010
Plasma etching method
TOKYO ELECTRON LTD12 citations82
US9660182B2May 23, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations67
US9208997B2Dec 8, 2015
Method of etching copper layer and mask
TOKYO ELECTRON LTD2 citations62
US7604908B2Oct 20, 2009
Fine pattern forming method
TOKYO ELECTRON LTD3 citations62
US8772172B2Jul 8, 2014
Semiconductor device manufacturing method and plasma etching apparatus
TOKYO ELECTRON LTD0 citations52
US7897498B2Mar 1, 2011
Method for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51
US7256135B2Aug 14, 2007
Etching method and computer storage medium storing program for controlling same
TOKYO ELECTRON LTD1 citations50
US7192532B2Mar 20, 2007
Dry etching method
TOKYO ELECTRON LTD0 citations50
US9419211B2Aug 16, 2016
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations49
US8962489B2Feb 24, 2015
Method for etching film containing cobalt and palladium
TOKYO ELECTRON LTD0 citations41
KUSHIBIKI MASATO
8 patentsUS8491805B2Jul 23, 2013
Semiconductor device manufacturing method and plasma etching apparatus
KUSHIBIKI MASATO211 citations98
US8642136B2Feb 4, 2014
Substrate processing method and substrate processing apparatus for performing a deposition process and calculating a termination time of the deposition process
KUSHIBIKI MASATO3 citations62
US8241511B2Aug 14, 2012
Substrate processing method
KUSHIBIKI MASATO3 citations62
US8530354B2Sep 10, 2013
Substrate processing method
KUSHIBIKI MASATO0 citations51
US8202805B2Jun 19, 2012
Substrate processing method
KUSHIBIKI MASATO0 citations51
US8815495B2Aug 26, 2014
Pattern forming method and manufacturing method of semiconductor device
KUSHIBIKI MASATO0 citations41
US8491804B2Jul 23, 2013
Substrate processing method
KUSHIBIKI MASATO0 citations41
US8252698B2Aug 28, 2012
Substrate processing method
KUSHIBIKI MASATO0 citations41