Inventor
ANDO HIROYOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “ANDO HIROYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5209813AMay 11, 1993
Lithographic apparatus and method
HITACHI LTD53 citations94
US5166529ANov 24, 1992
Electron beam lithography system
HITACHI LTD14 citations71
US5285075AFeb 8, 1994
Electron beam lithography method
HITACHI LTD8 citations69
US6751514B2Jun 15, 2004
Service method, service system and manufacturing/inspection apparatus
HITACHI LTD5 citations59