Inventor
MATSUOKA GENYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MATSUOKA GENYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS5209813AMay 11, 1993
Lithographic apparatus and method
HITACHI LTD53 citations94
US5396077AMar 7, 1995
Electron beam lithography apparatus having electron optics correction system
HITACHI LTD24 citations92
US5162240ANov 10, 1992
Method and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrate
HITACHI LTD47 citations92
US4701620AOct 20, 1987
Electron beam exposure apparatus
HITACHI LTD10 citations73
US5166529ANov 24, 1992
Electron beam lithography system
HITACHI LTD14 citations71
US4808829AFeb 28, 1989
Mark position detection system for use in charged particle beam apparatus
HITACHI LTD8 citations71
US5285075AFeb 8, 1994
Electron beam lithography method
HITACHI LTD8 citations69