Inventor

IWASAKI TERUO

JP3 patents

Patents

3 patents

US5209813AMay 11, 1993

Lithographic apparatus and method

HITACHI LTD53 citations94

US5166529ANov 24, 1992

Electron beam lithography system

HITACHI LTD14 citations71

US4445040AApr 24, 1984

Shaping aperture for a charged particle forming system

HITACHI LTD6 citations61