Inventor

BHUSHAN ABHAY K

US3 patents

⚠️ This page may combine multiple inventors who share the name “BHUSHAN ABHAY K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YIELDUP INTERNATIONAL

2 patents

US5542441AAug 6, 1996

Apparatus for delivering ultra-low particle counts in semiconductor manufacturing

YIELDUP INTERNATIONAL49 citations95

US5651379AJul 29, 1997

Method and apparatus for delivering ultra-low particle counts in semiconductor manufacturing

YIELDUP INTERNATIONAL27 citations91

SCD MOUNTAIN VIEW INC

1 patent

US6312597B1Nov 6, 2001

Apparatus for delivering ultra-low particle counts in semiconductor manufacturing

SCD MOUNTAIN VIEW INC16 citations91