Inventor
HEYERS KLAUS
DE19 patents
⚠️ This page may combine multiple inventors who share the name “HEYERS KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
16 patentsUS5723353AMar 3, 1998
Process for manufacturing a sensor
BOSCH GMBH ROBERT106 citations98
US5721377AFeb 24, 1998
Angular velocity sensor with built-in limit stops
BOSCH GMBH ROBERT74 citations96
US6055858AMay 2, 2000
Acceleration sensor
BOSCH GMBH ROBERT55 citations95
US5937275AAug 10, 1999
Method of producing acceleration sensors
BOSCH GMBH ROBERT67 citations95
US6825057B1Nov 30, 2004
Thermal membrane sensor and method for the production thereof
BOSCH GMBH ROBERT42 citations92
US6592664B1Jul 15, 2003
Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate
BOSCH GMBH ROBERT27 citations92
US6240777B1Jun 5, 2001
Sensor having a membrane
BOSCH GMBH ROBERT24 citations92
US6030515AFeb 29, 2000
Method for fabricating metal micropatterns
BOSCH GMBH ROBERT17 citations83
US7334491B2Feb 26, 2008
Sensor arrangement, in particular a micro-mechanical sensor arrangement
BOSCH GMBH ROBERT11 citations82
US6259350B1Jul 10, 2001
Sensor and method for manufacturing a sensor
BOSCH GMBH ROBERT16 citations81
US6645800B2Nov 11, 2003
Method for the production of a field-effect structure
BOSCH GMBH ROBERT3 citations63
US6724023B2Apr 20, 2004
Field effect transistor, especially for use as a sensor element or acceleration sensor
BOSCH GMBH ROBERT4 citations62
US7554249B2Jun 30, 2009
Electric motor
BOSCH GMBH ROBERT2 citations61
US6101872AAug 15, 2000
Sensor having a thin film element
BOSCH GMBH ROBERT5 citations60
US12224329B2Feb 11, 2025
Trench transistor
BOSCH GMBH ROBERT0 citations58
US12159900B2Dec 3, 2024
Power transistor cell and power transistor having field shielding contacting areas connecting field shielding areas to metal areas
BOSCH GMBH ROBERT0 citations46