Inventor
SONODA YUICHI
JP20 patents
Patents
20 patentsUS6346184B1Feb 12, 2002
Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device
CANON KK44 citations96
US5603778AFeb 18, 1997
Method of forming transparent conductive layer, photoelectric conversion device using the transparent conductive layer, and manufacturing method for the photoelectric conversion device
CANON KK57 citations96
US7282132B2Oct 16, 2007
Zinc oxide film treatment method and method of manufacturing photovoltaic device utilizing the same
CANON KK24 citations92
US6592739B1Jul 15, 2003
Process and apparatus for forming zinc oxide film, and process and apparatus for producing photovoltaic device
CANON KK51 citations92
US6576112B2Jun 10, 2003
Method of forming zinc oxide film and process for producing photovoltaic device using it
CANON KK19 citations92
US6238808B1May 29, 2001
Substrate with zinc oxide layer, method for producing zinc oxide layer, photovoltaic device, and method for producing photovoltaic device
CANON KK35 citations92
US6133061AOct 17, 2000
Method of forming thin zinc oxide film, and method of producing semiconductor element substrate and photovoltaic element using thin zinc oxide film
CANON KK25 citations92
US6068755AMay 30, 2000
Process for forming zinc oxide film and processes for producing semiconductor device plate and photo-electricity generating device using the film
CANON KK39 citations92
US6475367B1Nov 5, 2002
Electrodeposition method
CANON KK19 citations84
US7112264B2Sep 26, 2006
Plating apparatus and method
CANON KK12 citations83
US6802953B2Oct 12, 2004
Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device
CANON KK7 citations74
US6752915B2Jun 22, 2004
Web conveying apparatus, and apparatus and method for electrodeposition using web conveying apparatus
CANON KK7 citations74
US6660931B2Dec 9, 2003
Substrate for solar cell, solar cell having the same, and production process of solar cell
CANON KK9 citations74
US6544877B1Apr 8, 2003
Method of producing thin film of zinc oxide, process for manufacturing photovoltaic element using its method, and photovoltaic element
CANON KK12 citations74
US6471848B1Oct 29, 2002
Electrodeposition method of forming an oxide film
CANON KK12 citations74
US6383359B2May 7, 2002
Method for forming a zinc oxide layer and method for producing a photovoltaic device
CANON KK11 citations74
US6951771B2Oct 4, 2005
Method of forming laminate and method of manufacturing photovoltaic device
CANON KK6 citations73
US6733650B2May 11, 2004
Apparatus and process for producing zinc oxide film
CANON KK3 citations63
US7445952B2Nov 4, 2008
Method of forming laminate and method of manufacturing photovoltaic device
CANON KK2 citations62
US6632346B2Oct 14, 2003
Process for electrodepositing zinc oxide film
CANON KK1 citations52