Inventor
MORIOKA NATSUYO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MORIOKA NATSUYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6611728B1Aug 26, 2003
Inspection system and method for manufacturing electronic devices using the inspection system
HITACHI LTD71 citations95
US6733618B2May 11, 2004
Disturbance-free, recipe-controlled plasma processing system and method
HITACHI LTD18 citations92
US7601240B2Oct 13, 2009
Disturbance-free, recipe-controlled plasma processing system and method
HITACHI LTD9 citations84
US6881352B2Apr 19, 2005
Disturbance-free, recipe-controlled plasma processing method
HITACHI LTD12 citations84
US7945410B2May 17, 2011
Semiconductor device yield prediction system and method
HITACHI LTD8 citations83