Inventor

SOHN JEROME B

US2 patents

Patents

2 patents

US5646348AJul 8, 1997

Micromechanical sensor with a guard band electrode and fabrication technique therefor

DRAPER LAB CHARLES S51 citations89

US6770503B1Aug 3, 2004

Integrated packaging of micromechanical sensors and associated control circuits

DRAPER LAB CHARLES S13 citations81