Inventor
FUKAE KATSUYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUKAE KATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KANTO DENKA KOGYO KK
4 patentsUS7919141B2Apr 5, 2011
Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles
KANTO DENKA KOGYO KK8 citations80
US11814726B2Nov 14, 2023
Dry etching method or dry cleaning method
KANTO DENKA KOGYO KK0 citations59
US11584989B2Feb 21, 2023
Dry etching method or dry cleaning method
KANTO DENKA KOGYO KK1 citations59
US11183393B2Nov 23, 2021
Atomic layer etching using acid halide
KANTO DENKA KOGYO KK0 citations59