Inventor
DREWERY JOHN S
US15 patents
⚠️ This page may combine multiple inventors who share the name “DREWERY JOHN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
8 patentsUS7449098B1Nov 11, 2008
Method for planar electroplating
NOVELLUS SYSTEMS INC110 citations97
US6790773B1Sep 14, 2004
Process for forming barrier/seed structures for integrated circuits
NOVELLUS SYSTEMS INC132 citations97
US7682498B1Mar 23, 2010
Rotationally asymmetric variable electrode correction
NOVELLUS SYSTEMS INC39 citations92
US7531079B1May 12, 2009
Method and apparatus for uniform electropolishing of damascene IC structures by selective agitation
NOVELLUS SYSTEMS INC25 citations92
US6774039B1Aug 10, 2004
Process scheme for improving electroplating performance in integrated circuit manufacture
NOVELLUS SYSTEMS INC26 citations92
US6709565B2Mar 23, 2004
Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
NOVELLUS SYSTEMS INC42 citations92
US6764168B1Jul 20, 2004
Sensor for detecting droplet characteristics
NOVELLUS SYSTEMS INC26 citations89
US6756307B1Jun 29, 2004
Apparatus for electrically planarizing semiconductor wafers
NOVELLUS SYSTEMS INC40 citations89