Inventor
LILL THORSTEN B
US18 patents
⚠️ This page may combine multiple inventors who share the name “LILL THORSTEN B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6924191B2Aug 2, 2005
Method for fabricating a gate structure of a field effect transistor
APPLIED MATERIALS INC452 citations99
US6081334AJun 27, 2000
Endpoint detection for semiconductor processes
APPLIED MATERIALS INC251 citations98
US6406924B1Jun 18, 2002
Endpoint detection in the fabrication of electronic devices
APPLIED MATERIALS INC93 citations97
US8382999B2Feb 26, 2013
Pulsed plasma high aspect ratio dielectric process
APPLIED MATERIALS INC55 citations94
US6872322B1Mar 29, 2005
Multiple stage process for cleaning process chambers
APPLIED MATERIALS INC81 citations94
US6583065B1Jun 24, 2003
Sidewall polymer forming gas additives for etching processes
APPLIED MATERIALS INC105 citations94
US7122125B2Oct 17, 2006
Controlled polymerization on plasma reactor wall
APPLIED MATERIALS INC25 citations92
US6824813B1Nov 30, 2004
Substrate monitoring method and apparatus
APPLIED MATERIALS INC33 citations90
US7754610B2Jul 13, 2010
Process for etching tungsten silicide overlying polysilicon particularly in a flash memory
APPLIED MATERIALS INC2 citations59
US6914009B2Jul 5, 2005
Method of making small transistor lengths
APPLIED MATERIALS INC4 citations54
DAVIS MATTHEW F
3 patentsUS8232212B2Jul 31, 2012
Within-sequence metrology based process tuning for adaptive self-aligned double patterning
DAVIS MATTHEW F8 citations82
US8274645B2Sep 25, 2012
Method and apparatus for in-situ metrology of a workpiece disposed in a vacuum processing chamber
DAVIS MATTHEW F2 citations61
US8089046B2Jan 3, 2012
Method and apparatus for calibrating mass flow controllers
DAVIS MATTHEW F3 citations57