Inventor

BIGGS TODD L

US3 patents

Patents

3 patents

US7162810B2Jan 16, 2007

Micro tool alignment apparatus and method

INTEL CORP16 citations78

US7665399B2Feb 23, 2010

System and method for vacuum generated imprinting

INTEL CORP3 citations57

US7383769B2Jun 10, 2008

System and method for vacuum generated imprinting

INTEL CORP0 citations46