Inventor
LEE DONG-MOK
KR9 patents
⚠️ This page may combine multiple inventors who share the name “LEE DONG-MOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
3 patentsUS11705357B2Jul 18, 2023
Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck
SEMES CO LTD0 citations59
US12512305B2Dec 30, 2025
Plasma processing apparatus and plasma control method using magnetic field
SEMES CO LTD0 citations50
US12205802B2Jan 21, 2025
Substrate processing apparatus and method of fabricating same
SEMES CO LTD0 citations40