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Inventor
HARNIK ARIE
IL
7 patents
⚠️ This page may combine multiple inventors who share the name “HARNIK ARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COREFLOW SCIENT SOLUTIONS LTD
2 patents
US7604439B2
Oct 20, 2009
Non-contact support platforms for distance adjustment
COREFLOW SCIENT SOLUTIONS LTD
119 citations
95
US7603028B2
Oct 13, 2009
Non-contact thermal platforms
COREFLOW SCIENT SOLUTIONS LTD
53 citations
92
COREFLOW LTD
1 patent
US9022699B2
May 5, 2015
Method and system for locally controlling support of a flat object
COREFLOW LTD
6 citations
79
RICHMAN HILEL
1 patent
US8690489B2
Apr 8, 2014
Method and system for locally controlling support of a flat object
RICHMAN HILEL
9 citations
78
STEAG C V D SYTEMS LTD
1 patent
US6084213A
Jul 4, 2000
Method and apparatus for increasing temperature uniformity of heated wafers
STEAG C V D SYTEMS LTD
15 citations
65
STEAG CVD SYSTEMS LTD
1 patent
US6313443B1
Nov 6, 2001
Apparatus for processing material at controlled temperatures
STEAG CVD SYSTEMS LTD
11 citations
62
STREAG CVD SYSTEMS LTD
1 patent
US6362096B1
Mar 26, 2002
Wafer processing with water vapor pumping
STREAG CVD SYSTEMS LTD
0 citations
41