Inventor
CARRIS MICHAEL
US9 patents
⚠️ This page may combine multiple inventors who share the name “CARRIS MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS7282438B1Oct 16, 2007
Low-k SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC53 citations95
US7239017B1Jul 3, 2007
Low-k B-doped SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC42 citations95
US7968436B1Jun 28, 2011
Low-K SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC15 citations92
US7842604B1Nov 30, 2010
Low-k b-doped SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC17 citations92
US7573061B1Aug 11, 2009
Low-k SiC copper diffusion barrier films
NOVELLUS SYSTEMS INC24 citations92
US7420275B1Sep 2, 2008
Boron-doped SIC copper diffusion barrier films
NOVELLUS SYSTEMS INC39 citations92
US7163889B2Jan 16, 2007
Film for copper diffusion barrier
NOVELLUS SYSTEMS INC29 citations91