Inventor
BHATIA RITWIK
US8 patents
⚠️ This page may combine multiple inventors who share the name “BHATIA RITWIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH INC
4 patentsUS9929011B2Mar 27, 2018
Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations
ULTRATECH INC463 citations98
US10090153B2Oct 2, 2018
Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations
ULTRATECH INC3 citations72
US9768016B2Sep 19, 2017
Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations
ULTRATECH INC0 citations51
US9633850B2Apr 25, 2017
Masking methods for ALD processes for electrode-based devices
ULTRATECH INC0 citations50
APPLIED MATERIALS INC
3 patentsUS7501355B2Mar 10, 2009
Decreasing the etch rate of silicon nitride by carbon addition
APPLIED MATERIALS INC492 citations98
US7132353B1Nov 7, 2006
Boron diffusion barrier by nitrogen incorporation in spacer dielectrics
APPLIED MATERIALS INC67 citations94
US7951730B2May 31, 2011
Decreasing the etch rate of silicon nitride by carbon addition
APPLIED MATERIALS INC4 citations62