Inventor

SHIH HUI-SHEN

TW30 patents

⚠️ This page may combine multiple inventors who share the name “SHIH HUI-SHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIH HUI-SHEN

UNITED MICROELECTRONICS CORP

Contact efuse structure

Method of fabricating micro-electromechanical system microphone structure

Device for detecting abnormality in chemical-mechanical polishing operation

Integrated structure of MEMS device and CMOS image sensor device and fabricating method thereof

Semiconductor device and method of fabricating the same

Reworked integrated circuit device and reworking method thereof

Method of etching a dielectric layer to form a contact hole and a via hole and damascene method

Method of controlling statuses of wafers

Chemical mechanical polishing equipment and conditioning thereof

Method of supplying polishing liquid

Interlayer dielectric layer with two tensile dielectric layers

Method for fabricating interlayer dielectric layer

Chemical mechanical polishing method with inspection pre and post processing

Pad backer for polishing head of chemical mechanical polishing machine

Method for manufacturing semiconductor device that includes baking a dielectric layer after exposure to plasma

Method of transferring a wafer

CMP head

Method of preventing a peeling issue of a high stressed thin film

Method of cleaning reaction chamber, method of forming protection film and protection wafer

Fluid-confining apparatus

SHIH HUI-SHEN

Integrated structure of MEMS device and CMOS image sensor device

Semiconductor device and method of fabricating the same

Method of fabricating micro-electromechanical system microphone structure

Micro-electromechanical system microphone structure

MEMS diaphragm

Multifunction MEMS element and integrated method for making MOS and multifunction MEMS

MEMS diaphragm

MEMS diaphragm

YANG KUO-WEI

Method of transferring a wafer

HU SHU-HUI

Method for fabricating semiconductor device