Inventor
HOTTA SHOJI
US15 patents
⚠️ This page may combine multiple inventors who share the name “HOTTA SHOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6340632B1Jan 22, 2002
Method of manufacturing a semiconductor device
HITACHI LTD44 citations96
US6555464B2Apr 29, 2003
Semiconductor device and method of manufacturing the same
HITACHI LTD25 citations92
US7387867B2Jun 17, 2008
Manufacturing method of semiconductor integrated circuit device
HITACHI LTD12 citations84
US6656646B2Dec 2, 2003
Fabrication method of semiconductor integrated circuit device
HITACHI LTD14 citations84
US6528400B2Mar 4, 2003
Method of manufacturing a semiconductor device
HITACHI LTD8 citations74
HITACHI HIGH TECH CORP
4 patentsUS9659744B2May 23, 2017
Charged particle beam apparatus and inspection method using the same
HITACHI HIGH TECH CORP7 citations84
US7884325B2Feb 8, 2011
Electron beam measurement apparatus
HITACHI HIGH TECH CORP6 citations74
US10002743B2Jun 19, 2018
Measurement system and measurement method
HITACHI HIGH TECH CORP1 citations52
US7943903B2May 17, 2011
Defect inspection method and its system
HITACHI HIGH TECH CORP0 citations52
RENESAS TECH CORP
4 patentsUS6939649B2Sep 6, 2005
Fabrication method of semiconductor integrated circuit device and mask
RENESAS TECH CORP17 citations84
US6774020B2Aug 10, 2004
Semiconductor device and method of manufacturing the same
RENESAS TECH CORP4 citations74
US7419916B2Sep 2, 2008
Manufacturing method of semiconductor device
RENESAS TECH CORP2 citations63
US7109127B2Sep 19, 2006
Manufacturing method of semiconductor device
RENESAS TECH CORP1 citations52