Inventor
NARUKAWA MITSUTOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NARUKAWA MITSUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NARUKAWA MITSUTOSHI
5 patentsUS8221691B2Jul 17, 2012
Apparatus for producing trichlorosilane
NARUKAWA MITSUTOSHI0 citations49
US8551439B2Oct 8, 2013
Method of refining carbon parts for production of polycrystalline silicon
NARUKAWA MITSUTOSHI0 citations48
US9724665B2Aug 8, 2017
Apparatus for producing trichlorosilane and method for producing trichlorosilane
NARUKAWA MITSUTOSHI0 citations47
US8252241B2Aug 28, 2012
Apparatus for producing trichlorosilane and method for producing trichlorosilane
NARUKAWA MITSUTOSHI1 citations47
US8828345B2Sep 9, 2014
Method for manufacturing trichlorosilane
NARUKAWA MITSUTOSHI0 citations36