Inventor

HOIVIK NILS

NO2 patents

⚠️ This page may combine multiple inventors who share the name “HOIVIK NILS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV COLORADO

1 patent

US7426067B1Sep 16, 2008

Atomic layer deposition on micro-mechanical devices

UNIV COLORADO45 citations88

IBM

1 patent

US8865597B2Oct 21, 2014

Ta—TaN selective removal process for integrated device fabrication

IBM3 citations61