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Inventor
NAUMAN KEN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “NAUMAN KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAUMAN KEN
2 patents
US9150960B2
Oct 6, 2015
Methods and apparatus for sputtering using direct current
NAUMAN KEN
58 citations
92
US8133359B2
Mar 13, 2012
Methods and apparatus for sputtering deposition using direct current
NAUMAN KEN
37 citations
87
BUEHLER AG
1 patent
US12400830B2
Aug 26, 2025
RF sputtering of multiple electrodes with optimized plasma coupling through the implementation of capacitive and inductive components
BUEHLER AG
0 citations
60