Inventor
KAWAMURA AKIHIKO
JP5 patents
Patents
5 patentsUS10031429B2Jul 24, 2018
Method of obtaining position, exposure method, and method of manufacturing article
CANON KK3 citations63
US9880475B2Jan 30, 2018
Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method
CANON KK0 citations49
US9423700B2Aug 23, 2016
Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method
CANON KK1 citations49
US9377702B2Jun 28, 2016
Patterning method, lithography apparatus and system, and article manufacturing method
CANON KK1 citations46
US12253834B2Mar 18, 2025
Information processing device, determination method, molding defect inspection device, molding device, and method for manufacturing product
CANON KK0 citations38