Inventor
KOMURA ATSUSHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KOMURA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON DENSO CO
5 patentsUS5480832AJan 2, 1996
Method for fabrication of semiconductor device
NIPPON DENSO CO57 citations95
US5423941AJun 13, 1995
Dry etching process for semiconductor
NIPPON DENSO CO86 citations94
US6066891AMay 23, 2000
Electrode for semiconductor device including an alloy wiring layer for reducing defects in an aluminum layer and method for manufacturing the same
NIPPON DENSO CO21 citations91
US5522966AJun 4, 1996
Dry etching process for semiconductor
NIPPON DENSO CO38 citations90
US5018001AMay 21, 1991
Aluminum line with crystal grains
NIPPON DENSO CO13 citations72
DENSO CORP
5 patentsUS7901967B2Mar 8, 2011
Dicing method for semiconductor substrate
DENSO CORP20 citations90
US7838331B2Nov 23, 2010
Method for dicing semiconductor substrate
DENSO CORP16 citations84
US7642653B2Jan 5, 2010
Semiconductor device, wiring of semiconductor device, and method of forming wiring
DENSO CORP13 citations80
US6268298B1Jul 31, 2001
Method of manufacturing semiconductor device
DENSO CORP12 citations72
US6885466B1Apr 26, 2005
Method for measuring thickness of oxide film
DENSO CORP3 citations63
NGK SPARK PLUG CO
4 patentsUS8007561B2Aug 30, 2011
Cermet insert and cutting tool
NGK SPARK PLUG CO3 citations59
US11365154B2Jun 21, 2022
Silicon nitride-based sintered body and cutting insert
NGK SPARK PLUG CO1 citations58
US11173555B2Nov 16, 2021
Surface-coated cutting tool
NGK SPARK PLUG CO0 citations54
US10058925B2Aug 28, 2018
Sialon sintered body and cutting insert
NGK SPARK PLUG CO0 citations46