Inventor
CHANG HUNG JUI
TW34 patents
⚠️ This page may combine multiple inventors who share the name “CHANG HUNG JUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
23 patentsUS10510516B2Dec 17, 2019
Moving focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10504738B2Dec 10, 2019
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10998259B2May 4, 2021
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10566232B2Feb 18, 2020
Post-etch treatment of an electrically conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9691809B2Jun 27, 2017
Backside illuminated image sensor device having an oxide film and method of forming an oxide film of a backside illuminated image sensor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11569125B2Jan 31, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11195750B2Dec 7, 2021
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10707123B2Jul 7, 2020
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12300593B2May 13, 2025
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11810846B2Nov 7, 2023
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11227747B2Jan 18, 2022
Etch process with rotatable shower head
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11004730B2May 11, 2021
Methods of forming conductive features using a vacuum environment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10529543B2Jan 7, 2020
Etch process with rotatable shower head
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12266567B2Apr 1, 2025
Method of forming a barrier layer in an interconnect structure of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11854873B2Dec 26, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11335593B2May 17, 2022
Interconnect structure of semiconductor device including barrier layer located entirely in via
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11075087B2Jul 27, 2021
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12581754B2Mar 17, 2026
Method and apparatus to enhance semiconductor device manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10847349B2Nov 24, 2020
Moving focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10679891B2Jun 9, 2020
Methods of forming interconnect structures using a vacuum environment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10879051B2Dec 29, 2020
Method for controlling exposure region in bevel etching process for semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9484207B2Nov 1, 2016
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US11031279B2Jun 8, 2021
Semiconductor device with reduced trench loading effect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
TAIWAN SEMICONDUCTOR MFG
3 patentsUS7207339B2Apr 24, 2007
Method for cleaning a plasma enhanced CVD chamber
TAIWAN SEMICONDUCTOR MFG7 citations74
US9368394B1Jun 14, 2016
Dry etching gas and method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG6 citations71
US7955993B2Jun 7, 2011
Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film deposition
TAIWAN SEMICONDUCTOR MFG2 citations62
CHICONY POWER TECH CO LTD
3 patentsUS11128191B2Sep 21, 2021
Wire bonding device of stator of motor
CHICONY POWER TECH CO LTD2 citations64
US10190906B2Jan 29, 2019
Light sensor sensing illumination of a partial area
CHICONY POWER TECH CO LTD0 citations41
US9196973B2Nov 24, 2015
Solar junction box and wire connecting structure thereof
CHICONY POWER TECH CO LTD0 citations41