Inventor

LAI HUAN-WEN

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LAI HUAN-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE CHIH TSUNG

1 patent

US9982340B2May 29, 2018

Shower head apparatus and method for controlling plasma or gas distribution

LEE CHIH TSUNG2 citations65

TAIWAN SEMICONDUCTOR MFG

1 patent

US7102871B2Sep 5, 2006

Electrostatic chuck assembly having disassembling device

TAIWAN SEMICONDUCTOR MFG1 citations37