Inventor
MOCHIDA KENJI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MOCHIDA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10272478B2Apr 30, 2019
Substrate processing system, substrate cleaning method, and recording medium
TOKYO ELECTRON LTD7 citations83
US9818598B2Nov 14, 2017
Substrate cleaning method and recording medium
TOKYO ELECTRON LTD4 citations72
US10792711B2Oct 6, 2020
Substrate processing system, substrate cleaning method, and recording medium
TOKYO ELECTRON LTD1 citations62