Inventor
IWAYA TORU
JP22 patents
⚠️ This page may combine multiple inventors who share the name “IWAYA TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
17 patentsUS10304653B2May 28, 2019
Ion milling device, ion source and ion milling method
HITACHI HIGH TECH CORP3 citations72
US11621141B2Apr 4, 2023
Ion milling device and ion milling method
HITACHI HIGH TECH CORP2 citations70
US12051560B2Jul 30, 2024
Ion gun and ion milling machine
HITACHI HIGH TECH CORP0 citations62
US11158481B2Oct 26, 2021
Ion milling device, ion source, and ion milling method
HITACHI HIGH TECH CORP0 citations62
US10361065B2Jul 23, 2019
Ion milling system
HITACHI HIGH TECH CORP1 citations62
US12567557B2Mar 3, 2026
Ion milling device and ion milling method
HITACHI HIGH TECH CORP0 citations59
US11133153B2Sep 28, 2021
Ion milling device
HITACHI HIGH TECH CORP0 citations59
US12020893B2Jun 25, 2024
Ion milling device
HITACHI HIGH TECH CORP0 citations51
US11257654B2Feb 22, 2022
Ion milling apparatus
HITACHI HIGH TECH CORP0 citations51
US11244802B2Feb 8, 2022
Ion milling device and ion source adjusting method for ion milling device
HITACHI HIGH TECH CORP0 citations50
US10008365B2Jun 26, 2018
Ion milling device
HITACHI HIGH TECH CORP0 citations49
US9499900B2Nov 22, 2016
Ion milling device
HITACHI HIGH TECH CORP0 citations49
US9761412B2Sep 12, 2017
Ion milling apparatus and sample processing method
HITACHI HIGH TECH CORP0 citations48
US9558912B2Jan 31, 2017
Ion milling device
HITACHI HIGH TECH CORP0 citations48
US10269534B2Apr 23, 2019
Mask position adjustment method of ion milling, electron microscope capable of adjusting mask position, mask adjustment device mounted on sample stage and sample mask component of ion milling device
HITACHI HIGH TECH CORP0 citations47
US10332722B2Jun 25, 2019
Ion milling device and ion milling method
HITACHI HIGH TECH CORP0 citations41
US10832889B2Nov 10, 2020
Charged particle beam device
HITACHI HIGH TECH CORP0 citations40
HITACHI SCIENCE SYSTEMS LTD
3 patentsUS6920703B2Jul 26, 2005
Microstructure drying treatment method and its apparatus and its high pressure vessel
HITACHI SCIENCE SYSTEMS LTD15 citations75
US7033089B2Apr 25, 2006
Method of developing a resist film and a resist development processor
HITACHI SCIENCE SYSTEMS LTD6 citations69
US7179000B2Feb 20, 2007
Method of developing a resist film and a resist development processor
HITACHI SCIENCE SYSTEMS LTD0 citations48