Inventor
HIRAO TOMONORI
JP10 patents
Patents
10 patentsUS11658058B2May 23, 2023
Substrate holding apparatus
EBARA CORP2 citations71
US11015261B2May 25, 2021
Substrate holder and plating apparatus
EBARA CORP0 citations61
US11434580B2Sep 6, 2022
Plating apparatus
EBARA CORP0 citations60
US9388504B2Jul 12, 2016
Plating apparatus and plating method
EBARA CORP1 citations59
US12027402B2Jul 2, 2024
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations51
US11098413B2Aug 24, 2021
Plating apparatus and plating method
EBARA CORP0 citations49
US11339496B2May 24, 2022
Plating apparatus
EBARA CORP0 citations48
US11332838B2May 17, 2022
Plating apparatus
EBARA CORP0 citations48
US10577706B2Mar 3, 2020
Plating apparatus
EBARA CORP0 citations48
US10294576B2May 21, 2019
Plating apparatus
EBARA CORP0 citations48