Inventor
SHUGRUE JOHN KEVIN
US15 patents
⚠️ This page may combine multiple inventors who share the name “SHUGRUE JOHN KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
13 patentsUS9657845B2May 23, 2017
Variable conductance gas distribution apparatus and method
ASM IP HOLDING BV469 citations97
US10872804B2Dec 22, 2020
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
ASM IP HOLDING BV7 citations83
US10872803B2Dec 22, 2020
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
ASM IP HOLDING BV6 citations83
US11629406B2Apr 18, 2023
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
ASM IP HOLDING BV3 citations72
US10941490B2Mar 9, 2021
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
ASM IP HOLDING BV4 citations71
US12234552B2Feb 25, 2025
Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatus
ASM IP HOLDING BV0 citations62
US11939673B2Mar 26, 2024
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
ASM IP HOLDING BV0 citations62
US11626313B2Apr 11, 2023
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
ASM IP HOLDING BV0 citations62
US11795545B2Oct 24, 2023
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
ASM IP HOLDING BV0 citations61
US11891693B2Feb 6, 2024
Systems and methods for controlling vapor phase processing
ASM IP HOLDING BV0 citations55
US10774422B2Sep 15, 2020
Systems and methods for controlling vapor phase processing
ASM IP HOLDING BV1 citations55
US12276023B2Apr 15, 2025
Showerhead assembly for distributing a gas within a reaction chamber
ASM IP HOLDING BV0 citations51
US10561975B2Feb 18, 2020
Variable conductance gas distribution apparatus and method
ASM IP HOLDING BV0 citations51