Inventor
SHINODA KEN-ICHIRO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SHINODA KEN-ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
17 patentsUS6674514B2Jan 6, 2004
Illumination optical system in exposure apparatus
CANON KK43 citations91
US6560044B2May 6, 2003
Illumination optical system in exposure apparatus
CANON KK23 citations91
US10761316B2Sep 1, 2020
Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article
CANON KK2 citations72
US7209218B2Apr 24, 2007
Exposure apparatus and method for manufacturing device using the exposure apparatus
CANON KK7 citations71
US12226936B2Feb 18, 2025
Substrate processing apparatus, substrate processing method, and article manufacturing method
CANON KK1 citations61
US9465308B2Oct 11, 2016
Imprint apparatus, imprint method and method of manufacturing an article
CANON KK2 citations61
US7955765B2Jun 7, 2011
Adjustment method, exposure method, device manufacturing method, and exposure apparatus
CANON KK6 citations61
US7385672B2Jun 10, 2008
Exposure apparatus and method
CANON KK5 citations61
US7242457B2Jul 10, 2007
Exposure apparatus and exposure method, and device manufacturing method using the same
CANON KK5 citations61
US11480872B2Oct 25, 2022
Imprint apparatus, imprint method, and method for manufacturing article
CANON KK0 citations51
US9910351B2Mar 6, 2018
Imprint apparatus and article manufacturing method
CANON KK0 citations51
US9616613B2Apr 11, 2017
Imprint apparatus including alignment and overlay measurement
CANON KK1 citations51
US9541825B2Jan 10, 2017
Imprint apparatus and article manufacturing method
CANON KK1 citations51
US11709421B2Jul 25, 2023
Imprint apparatus
CANON KK0 citations50
US10386737B2Aug 20, 2019
Imprint apparatus and method for producing article
CANON KK0 citations50
US10859912B2Dec 8, 2020
Imprint apparatus, imprint method, and article manufacturing method
CANON KK0 citations41
US9625837B2Apr 18, 2017
Imprint apparatus and method of manufacturing article
CANON KK0 citations40