Inventor

RUHM MATTHIAS

DE4 patents

⚠️ This page may combine multiple inventors who share the name “RUHM MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES US INC

1 patent

US12253472B2Mar 18, 2025

System and method for detecting a defect in a specimen

GLOBALFOUNDRIES US INC0 citations54

HOTZEL ARTHUR

1 patent

US9091943B2Jul 28, 2015

Asymmetric reticle heating of multilayer reticles eliminated by dummy exposures and related methods

HOTZEL ARTHUR1 citations45

GLOBALFOUNDRIES INC

1 patent

US10115621B2Oct 30, 2018

Method for in-die overlay control using FEOL dummy fill layer

GLOBALFOUNDRIES INC1 citations44

VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS

1 patent

US8648997B2Feb 11, 2014

Member with a cleaning surface and a method of removing contamination

VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS0 citations36