Inventor

COTTE ERIC

DE3 patents

⚠️ This page may combine multiple inventors who share the name “COTTE ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR MIE GMBH

1 patent

US8352886B2Jan 8, 2013

Method for the reproducible determination of the position of structures on a mask with a pellicle frame

KLA TENCOR MIE GMBH4 citations51

HOTZEL ARTHUR

1 patent

US9091943B2Jul 28, 2015

Asymmetric reticle heating of multilayer reticles eliminated by dummy exposures and related methods

HOTZEL ARTHUR1 citations45

GLOBALFOUNDRIES INC

1 patent

US9881122B2Jan 30, 2018

Overlay sampling reduction

GLOBALFOUNDRIES INC1 citations38