Inventor
O'NEILL JAMES A
US16 patents
⚠️ This page may combine multiple inventors who share the name “O'NEILL JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS5431734AJul 11, 1995
Aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control
IBM431 citations98
US5200023AApr 6, 1993
Infrared thermographic method and apparatus for etch process monitoring and control
IBM181 citations98
US5308414AMay 3, 1994
Method and apparatus for optical emission end point detection in plasma etching processes
IBM79 citations95
US5284549AFeb 8, 1994
Selective fluorocarbon-based RIE process utilizing a nitrogen additive
IBM36 citations91
US5433258AJul 18, 1995
Gettering of particles during plasma processing
IBM15 citations82
US5332441AJul 26, 1994
Apparatus for gettering of particles during plasma processing
IBM17 citations82
US5540777AJul 30, 1996
Aluminum oxide LPCVD system
IBM17 citations81
US6518145B1Feb 11, 2003
Methods to control the threshold voltage of a deep trench corner device
IBM10 citations73
US5534066AJul 9, 1996
Fluid delivery apparatus having an infrared feedline sensor
IBM14 citations73
US5492718AFeb 20, 1996
Fluid delivery apparatus and method having an infrared feedline sensor
IBM11 citations73