Inventor
SINGH JYOTHI
US14 patents
Patents
14 patentsUS5770097AJun 23, 1998
Control of etch selectivity
IBM56 citations95
US5738440AApr 14, 1998
Combined emissivity and radiance measurement for the determination of the temperature of a radiant object
IBM52 citations95
US5683538ANov 4, 1997
Control of etch selectivity
IBM85 citations95
US5308414AMay 3, 1994
Method and apparatus for optical emission end point detection in plasma etching processes
IBM79 citations95
US5367139ANov 22, 1994
Methods and apparatus for contamination control in plasma processing
IBM60 citations94
US5993059ANov 30, 1999
Combined emissivity and radiance measurement for determination of temperature of radiant object
IBM43 citations92
US5953115ASep 14, 1999
Method and apparatus for imaging surface topography of a wafer
IBM35 citations92
US4846920AJul 11, 1989
Plasma amplified photoelectron process endpoint detection apparatus
IBM53 citations92
US5387777AFeb 7, 1995
Methods and apparatus for contamination control in plasma processing
IBM42 citations91
US5382911AJan 17, 1995
Reaction chamber interelectrode gap monitoring by capacitance measurement
IBM32 citations89
US5534066AJul 9, 1996
Fluid delivery apparatus having an infrared feedline sensor
IBM14 citations73
US5492718AFeb 20, 1996
Fluid delivery apparatus and method having an infrared feedline sensor
IBM11 citations73
US6291833B2Sep 18, 2001
Apparatus for mapping scratches in an oxide film
IBM2 citations62
US6048745AApr 11, 2000
Method for mapping scratches in an oxide film
IBM4 citations62