Inventor
ILG MATTHIAS
US18 patents
⚠️ This page may combine multiple inventors who share the name “ILG MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
12 patentsUS5807792ASep 15, 1998
Uniform distribution of reactants in a device layer
SIEMENS AG236 citations98
US6492688B1Dec 10, 2002
Dual work function CMOS device
SIEMENS AG42 citations92
US6376348B1Apr 23, 2002
Reliable polycide gate stack with reduced sheet resistance and thickness
SIEMENS AG20 citations92
US6319787B1Nov 20, 2001
Method for forming a high surface area trench capacitor
SIEMENS AG33 citations92
US6197666B1Mar 6, 2001
Method for the fabrication of a doped silicon layer
SIEMENS AG21 citations92
US6130145AOct 10, 2000
Insitu doped metal policide
SIEMENS AG50 citations92
US5935873AAug 10, 1999
Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching
SIEMENS AG21 citations92
US5928959AJul 27, 1999
Dishing resistance
SIEMENS AG34 citations90
US6492282B1Dec 10, 2002
Integrated circuits and manufacturing methods
SIEMENS AG10 citations73
US5963837AOct 5, 1999
Method of planarizing the semiconductor structure
SIEMENS AG8 citations73
US6096654AAug 1, 2000
Gapfill of semiconductor structure using doped silicate glasses
SIEMENS AG8 citations70
US6048475AApr 11, 2000
Gapfill of semiconductor structure using doped silicate glasses
SIEMENS AG7 citations70
IBM
4 patentsUS5753948AMay 19, 1998
Advanced damascene planar stack capacitor fabrication method
IBM55 citations95
US6027968AFeb 22, 2000
Advanced damascene planar stack capacitor fabrication method
IBM28 citations92
US6190955B1Feb 20, 2001
Fabrication of trench capacitors using disposable hard mask
IBM25 citations91
US6057250AMay 2, 2000
Low temperature reflow dielectric-fluorinated BPSG
IBM16 citations80