Inventor
SUNAKAWA KEN
JP3 patents
Patents
3 patentsUS6140131AOct 31, 2000
Method and apparatus for detecting heavy metals in silicon wafer bulk with high sensitivity
SHINETSU HANDOTAI KK25 citations84
US11761118B2Sep 19, 2023
Carbon-doped silicon single crystal wafer and method for manufacturing the same
SHINETSU HANDOTAI KK0 citations51
US11408092B2Aug 9, 2022
Method for heat-treating silicon single crystal wafer
SHINETSU HANDOTAI KK0 citations41