P

Inventor

DESPONT MICHEL

CH68 patents
⚠️ This page may combine multiple inventors who share the name “DESPONT MICHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

34 patents
US7928565B2Apr 19, 2011

Semiconductor device with a high thermal dissipation efficiency

IBM67 citations98
US6835589B2Dec 28, 2004

Three-dimensional integrated CMOS-MEMS device and process for making the same

IBM48 citations96
US6647766B2Nov 18, 2003

Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever

IBM44 citations96
US7271034B2Sep 18, 2007

Semiconductor device with a high thermal dissipation efficiency

IBM17 citations93
US7071031B2Jul 4, 2006

Three-dimensional integrated CMOS-MEMS device and process for making the same

IBM42 citations93
US7054257B2May 30, 2006

AFM-based data storage and microscopy

IBM20 citations93
US6218086B1Apr 17, 2001

Method of forming ultrasmall structures and apparatus therefor

IBM50 citations93
US7724988B2May 25, 2010

Opto-electronic board

IBM17 citations92
US6566653B1May 20, 2003

Investigation device and method

IBM27 citations89
US7713789B2May 11, 2010

Semiconductor device with a high thermal dissipation efficiency

IBM12 citations84
US7566939B2Jul 28, 2009

Fabrication of silicon micro-mechanical structures

IBM10 citations84
US7336864B2Feb 26, 2008

Opto-electronic board

IBM13 citations84
US7186019B2Mar 6, 2007

Thermal movement sensor

IBM15 citations84
US9070578B2Jun 30, 2015

Electromechanical switching device with 2D layered material surfaces

IBM10 citations83
US7482826B2Jan 27, 2009

Probe for scanning over a substrate and a data storage device

IBM8 citations82
US7268348B2Sep 11, 2007

Scanning probe for data storage and microscopy

IBM17 citations82
US7351604B2Apr 1, 2008

Microstructures

IBM10 citations81
US6949397B2Sep 27, 2005

Fabrication of silicon micro mechanical structures

IBM6 citations74
US7480426B1Jan 20, 2009

Method of forming a three-dimensional stacked optical device

IBM7 citations73
US7146067B2Dec 5, 2006

Microsystem switches

IBM10 citations73
US6770558B2Aug 3, 2004

Selective filling of electrically conductive vias for three dimensional device structures

IBM11 citations73
US6080513AJun 27, 2000

Mask and method for modification of a surface

IBM9 citations73
US11342149B2May 24, 2022

Integrated electro-mechanical actuator

IBM0 citations63
US7491425B2Feb 17, 2009

Scanning probe-based lithography method

IBM3 citations63
US6792173B2Sep 14, 2004

Device and method for switching optical signals

IBM3 citations63
US9276579B2Mar 1, 2016

Nano-electro-mechanical-switch adiabatic dynamic logic circuits

IBM2 citations62
US7477811B1Jan 13, 2009

Method of forming a three-dimensional stacked optical device

IBM5 citations62
US7523547B2Apr 28, 2009

Method for attaching a flexible structure to a device and a device having a flexible structure

IBM3 citations60
US7409488B2Aug 5, 2008

Data processing system

IBM2 citations60
US10079128B2Sep 18, 2018

Integrated electro-mechanical actuator

IBM0 citations52
US9297704B2Mar 29, 2016

Modulation methods for CMOS-based thermal sensors

IBM0 citations52
US8387160B2Feb 26, 2013

Scanning probe-based lithography method

IBM0 citations52
US7906887B2Mar 15, 2011

Microsystem and method for positioning a second element with respect to a first element in a microsystem

IBM0 citations52
US7862858B2Jan 4, 2011

Scanning probe-based lithography method

IBM0 citations52

SEIKO INSTR INC

3 patents

ROSSEL CHRISTOPHE P

2 patents

BISKEBORN ROBERT GLENN

2 patents

BHASKARAN HARISH

2 patents

DESPONT MICHEL

1 patent

DELLMANN LAURENT A

1 patent

BERMAN DAVID

1 patent

CSEM CENTRE SUISSE DELECTRONIQUE ET DE MICROTECHNIQUE SA—RECHERCHE ET DEV

1 patent

OGGIONI STEFANO S

1 patent

CORCOS DAN

1 patent

DANGEL ROGER

1 patent

Showing the top 50 of 68 patents by PatentIndex Score.