Inventor
DESPONT MICHEL
CH68 patents
⚠️ This page may combine multiple inventors who share the name “DESPONT MICHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
34 patentsUS7928565B2Apr 19, 2011
Semiconductor device with a high thermal dissipation efficiency
IBM67 citations98
US6835589B2Dec 28, 2004
Three-dimensional integrated CMOS-MEMS device and process for making the same
IBM48 citations96
US6647766B2Nov 18, 2003
Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
IBM44 citations96
US7271034B2Sep 18, 2007
Semiconductor device with a high thermal dissipation efficiency
IBM17 citations93
US7071031B2Jul 4, 2006
Three-dimensional integrated CMOS-MEMS device and process for making the same
IBM42 citations93
US7054257B2May 30, 2006
AFM-based data storage and microscopy
IBM20 citations93
US6218086B1Apr 17, 2001
Method of forming ultrasmall structures and apparatus therefor
IBM50 citations93
US7724988B2May 25, 2010
Opto-electronic board
IBM17 citations92
US6566653B1May 20, 2003
Investigation device and method
IBM27 citations89
US7713789B2May 11, 2010
Semiconductor device with a high thermal dissipation efficiency
IBM12 citations84
US7566939B2Jul 28, 2009
Fabrication of silicon micro-mechanical structures
IBM10 citations84
US7336864B2Feb 26, 2008
Opto-electronic board
IBM13 citations84
US7186019B2Mar 6, 2007
Thermal movement sensor
IBM15 citations84
US9070578B2Jun 30, 2015
Electromechanical switching device with 2D layered material surfaces
IBM10 citations83
US7482826B2Jan 27, 2009
Probe for scanning over a substrate and a data storage device
IBM8 citations82
US7268348B2Sep 11, 2007
Scanning probe for data storage and microscopy
IBM17 citations82
US7351604B2Apr 1, 2008
Microstructures
IBM10 citations81
US6949397B2Sep 27, 2005
Fabrication of silicon micro mechanical structures
IBM6 citations74
US7480426B1Jan 20, 2009
Method of forming a three-dimensional stacked optical device
IBM7 citations73
US7146067B2Dec 5, 2006
Microsystem switches
IBM10 citations73
US6770558B2Aug 3, 2004
Selective filling of electrically conductive vias for three dimensional device structures
IBM11 citations73
US6080513AJun 27, 2000
Mask and method for modification of a surface
IBM9 citations73
US11342149B2May 24, 2022
Integrated electro-mechanical actuator
IBM0 citations63
US7491425B2Feb 17, 2009
Scanning probe-based lithography method
IBM3 citations63
US6792173B2Sep 14, 2004
Device and method for switching optical signals
IBM3 citations63
US9276579B2Mar 1, 2016
Nano-electro-mechanical-switch adiabatic dynamic logic circuits
IBM2 citations62
US7477811B1Jan 13, 2009
Method of forming a three-dimensional stacked optical device
IBM5 citations62
US7523547B2Apr 28, 2009
Method for attaching a flexible structure to a device and a device having a flexible structure
IBM3 citations60
US7409488B2Aug 5, 2008
Data processing system
IBM2 citations60
US10079128B2Sep 18, 2018
Integrated electro-mechanical actuator
IBM0 citations52
US9297704B2Mar 29, 2016
Modulation methods for CMOS-based thermal sensors
IBM0 citations52
US8387160B2Feb 26, 2013
Scanning probe-based lithography method
IBM0 citations52
US7906887B2Mar 15, 2011
Microsystem and method for positioning a second element with respect to a first element in a microsystem
IBM0 citations52
US7862858B2Jan 4, 2011
Scanning probe-based lithography method
IBM0 citations52
SEIKO INSTR INC
3 patentsUS6211540B1Apr 3, 2001
Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor
SEIKO INSTR INC22 citations92
US6388252B1May 14, 2002
Self-detecting type of SPM probe and SPM device
SEIKO INSTR INC16 citations84
US6294099B1Sep 25, 2001
Method of processing circular patterning
SEIKO INSTR INC2 citations58
ROSSEL CHRISTOPHE P
2 patentsBISKEBORN ROBERT GLENN
2 patentsBHASKARAN HARISH
2 patentsDESPONT MICHEL
1 patentDELLMANN LAURENT A
1 patentBERMAN DAVID
1 patentCSEM CENTRE SUISSE DELECTRONIQUE ET DE MICROTECHNIQUE SA—RECHERCHE ET DEV
1 patentOGGIONI STEFANO S
1 patentCORCOS DAN
1 patentDANGEL ROGER
1 patentShowing the top 50 of 68 patents by PatentIndex Score.