P

Inventor

LIU CHEN-YU

TW99 patents
⚠️ This page may combine multiple inventors who share the name “LIU CHEN-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

30 patents
US9704711B2Jul 11, 2017

Silicon-based middle layer composition

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9543147B2Jan 10, 2017

Photoresist and method of manufacture

TAIWAN SEMICONDUCTOR MFG CO LTD12 citations84
US9502231B2Nov 22, 2016

Photoresist layer and method

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US11822237B2Nov 21, 2023

Method of manufacturing a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11681221B2Jun 20, 2023

EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11079681B2Aug 3, 2021

Lithography method for positive tone development

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10421867B2Sep 24, 2019

Priming material for substrate coating

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10394123B2Aug 27, 2019

Blocking layer material composition and methods thereof in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10115585B2Oct 30, 2018

Hardmask composition and methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10083832B1Sep 25, 2018

Under layer composition and method of manufacturing semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9927707B2Mar 27, 2018

Developer for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9612536B2Apr 4, 2017

Developer for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US9580672B2Feb 28, 2017

Cleaning composition and method for semiconductor device fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US9768022B2Sep 19, 2017

Advanced cross-linkable layer over a substrate

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12347727B2Jul 1, 2025

Treatment of spin on organic material to improve wet resistance

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12222654B2Feb 11, 2025

Lithography method for positive tone development

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12210283B2Jan 28, 2025

EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11708495B2Jul 25, 2023

Priming material for substrate coating

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US10520821B2Dec 31, 2019

Lithography process with enhanced etch selectivity

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US9460909B2Oct 4, 2016

Method for manufacturing semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations63
US12581897B2Mar 17, 2026

Liquid storage for facility chemical supply system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12541149B2Feb 3, 2026

Resist dispensing system and method of use

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12292684B2May 6, 2025

Adhesion layer for multi-layer photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12222653B2Feb 11, 2025

Method for forming semiconductor structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12135501B2Nov 5, 2024

Method of manufacturing a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11769678B2Sep 26, 2023

Liquid storage for facility chemical supply system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11754923B2Sep 12, 2023

Resist dispensing system and method of use

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11694896B2Jul 4, 2023

Photoresist developer and method of developing photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11378884B2Jul 5, 2022

Extreme ultraviolet photoresist and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11143963B2Oct 12, 2021

Negative tone developer for extreme ultraviolet lithography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

LIU CHEN-YU

9 patents

TPK TOUCH SOLUTIONS INC

5 patents

TAIWAN SEMICONDUCTOR MFG

3 patents

HEP TECH CO LTD

1 patent

LIU CHEN YU

1 patent

QUANTA DISPLAY INC

1 patent

Showing the top 50 of 99 patents by PatentIndex Score.