Inventor
LEE YUNG-HEE YVETTE
US13 patents
⚠️ This page may combine multiple inventors who share the name “LEE YUNG-HEE YVETTE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7682518B2Mar 23, 2010
Process for etching a metal layer suitable for use in photomask fabrication
APPLIED MATERIALS INC183 citations98
US7250309B2Jul 31, 2007
Integrated phase angle and optical critical dimension measurement metrology for feed forward and feedback process control
APPLIED MATERIALS INC39 citations92
US6921723B1Jul 26, 2005
Etching method having high silicon-to-photoresist selectivity
APPLIED MATERIALS INC20 citations92
US7521000B2Apr 21, 2009
Process for etching photomasks
APPLIED MATERIALS INC6 citations72
US7365014B2Apr 29, 2008
Reticle fabrication using a removable hard mask
APPLIED MATERIALS INC7 citations72
US7737040B2Jun 15, 2010
Method of reducing critical dimension bias during fabrication of a semiconductor device
APPLIED MATERIALS INC0 citations51
UNIV CALIFORNIA
4 patentsUS6094012AJul 25, 2000
Low energy spread ion source with a coaxial magnetic filter
UNIV CALIFORNIA54 citations96
US5945677AAug 31, 1999
Focused ion beam system
UNIV CALIFORNIA69 citations94
US6486480B1Nov 26, 2002
Plasma formed ion beam projection lithography system
UNIV CALIFORNIA26 citations86
US6124834ASep 26, 2000
Glass antenna for RF-ion source operation
UNIV CALIFORNIA14 citations73