Inventor
MEZZAPELLE JOSEPH J
US4 patents
⚠️ This page may combine multiple inventors who share the name “MEZZAPELLE JOSEPH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS7018779B2Mar 28, 2006
Apparatus and method to improve resist line roughness in semiconductor wafer processing
IBM13 citations82
US7276450B2Oct 2, 2007
Etching processes using C4F8 for silicon dioxide and CF4 for titanium nitride
IBM7 citations69
US7535349B2May 19, 2009
Determining root cause for alarm in processing system
IBM3 citations59