Inventor

CHANG SEN-TAY

TW2 patents

Patents

2 patents

US7179663B2Feb 20, 2007

CDA controller and method for stabilizing dome temperature

TAIWAN SEMICONDUCTOR MFG2 citations48

US6733617B2May 11, 2004

Direct detection of dielectric etch system magnet driver and coil malfunctions

TAIWAN SEMICONDUCTOR MFG0 citations39