Inventor
WANG PIN-CHIN C
US12 patents
Patents
12 patentsUS6447933B1Sep 10, 2002
Formation of alloy material using alternating depositions of alloy doping element and bulk material
ADVANCED MICRO DEVICES INC115 citations97
US6664185B1Dec 16, 2003
Self-aligned barrier formed with an alloy having at least two dopant elements for minimized resistance of interconnect
ADVANCED MICRO DEVICES INC45 citations96
US6228759B1May 8, 2001
Method of forming an alloy precipitate to surround interconnect to minimize electromigration
ADVANCED MICRO DEVICES INC69 citations94
US6831003B1Dec 14, 2004
Continuous barrier for interconnect structure formed in porous dielectric material with minimized electromigration
ADVANCED MICRO DEVICES INC29 citations92
US6528412B1Mar 4, 2003
Depositing an adhesion skin layer and a conformal seed layer to fill an interconnect opening
ADVANCED MICRO DEVICES INC35 citations92
US6426293B1Jul 30, 2002
Minimizing resistance and electromigration of interconnect by adjusting anneal temperature and amount of seed layer dopant
ADVANCED MICRO DEVICES INC22 citations92
US6207552B1Mar 27, 2001
Forming and filling a recess in interconnect for encapsulation to minimize electromigration
ADVANCED MICRO DEVICES INC51 citations92
US6387806B1May 14, 2002
Filling an interconnect opening with different types of alloys to enhance interconnect reliability
ADVANCED MICRO DEVICES INC47 citations90
US6358840B1Mar 19, 2002
Forming and filling a recess in interconnect with alloy to minimize electromigration
ADVANCED MICRO DEVICES INC22 citations90
US6309959B1Oct 30, 2001
Formation of self-aligned passivation for interconnect to minimize electromigration
ADVANCED MICRO DEVICES INC28 citations90
US6833625B1Dec 21, 2004
Self-aligned barrier formed with an alloy having at least two dopant elements for minimized resistance of interconnect
ADVANCED MICRO DEVICES INC14 citations84
US6573179B1Jun 3, 2003
Forming a strong interface between interconnect and encapsulation to minimize electromigration
ADVANCED MICRO DEVICES INC11 citations73