Inventor
FROEBEL ROBERT T
US4 patents
⚠️ This page may combine multiple inventors who share the name “FROEBEL ROBERT T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS7456966B2Nov 25, 2008
Alignment mark system and method to improve wafer alignment search range
IBM5 citations58
US7656505B2Feb 2, 2010
Apparatus to easily measure reticle blind positioning with an exposure apparatus
IBM0 citations45
US7005221B2Feb 28, 2006
Method and apparatus to easily measure reticle blind positioning with an exposure apparatus
IBM0 citations45