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Inventor
PEALER III GRANT N
US
3 patents
⚠️ This page may combine multiple inventors who share the name “PEALER III GRANT N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
2 patents
US7656505B2
Feb 2, 2010
Apparatus to easily measure reticle blind positioning with an exposure apparatus
IBM
0 citations
45
US7005221B2
Feb 28, 2006
Method and apparatus to easily measure reticle blind positioning with an exposure apparatus
IBM
0 citations
45
FROEBEL ROBERT T
1 patent
US8634063B2
Jan 21, 2014
Wafer with design printed outside active region and spaced by design tolerance of reticle blind
FROEBEL ROBERT T
0 citations
39