Inventor
SONNTAG PAUL D
US8 patents
⚠️ This page may combine multiple inventors who share the name “SONNTAG PAUL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS6513796B2Feb 4, 2003
Wafer chuck having a removable insert
IBM76 citations96
US6528219B1Mar 4, 2003
Dynamic alignment scheme for a photolithography system
IBM33 citations91
US7687210B2Mar 30, 2010
Space tolerance with stitching
IBM4 citations61
US7456966B2Nov 25, 2008
Alignment mark system and method to improve wafer alignment search range
IBM5 citations58
US7171319B2Jan 30, 2007
Method and apparatus to separate field and grid parameters on first level wafers
IBM0 citations51
US7656505B2Feb 2, 2010
Apparatus to easily measure reticle blind positioning with an exposure apparatus
IBM0 citations45
US7005221B2Feb 28, 2006
Method and apparatus to easily measure reticle blind positioning with an exposure apparatus
IBM0 citations45