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Inventor
WONG SHY CHY
TW
2 patents
Patents
2 patents
US6916722B2
Jul 12, 2005
Method to fabricate high reliable metal capacitor within copper back-end process
TAIWAN SEMICONDUCTOR MFG
22 citations
91
US7122878B2
Oct 17, 2006
Method to fabricate high reliable metal capacitor within copper back-end process
TAIWAN SEMICONDUCTOR MFG
12 citations
82